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Labco · Technology partner
Particle monitoring & environmental control
Explore stationary particle counters, wafer-type monitoring, monitoring software and Web Server/LTE systems.
Technology at a glance
Fixed Particle Counter
LPC-R203PLUS and LPC-R205 support continuous 24/7 monitoring and multiple communication interfaces.
Wafer Type Counter
WPMS/VPMS provide near-process monitoring at wafers and equipment, with software integration and data traceability.
Monitoring Platform
MPC Monitor, TEMS and Web Server (LTE) support integrated monitoring and alerts.