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RIX Corporation · Technology partner
Process fluids & rotary joints
Rotary joint platforms for fluid transfer in front-end and back-end semiconductor processes.
Technology at a glance
MS series multi-port design
2 Port and 3 Port configurations for multiple fluid paths within a tool.
High-purity fluid transfer
Designed for semiconductor equipment, with attention to sealing stability, serviceability and reliability.
Across the process flow
Rotary fluid interfaces for front-end, back-end and packaging equipment.